Speaker
Description
Description: Using the BornAgain software package 3D models of nanostructures can directly be fitted to experimental 2D patterns. Nanostructures with well defined form factors and structure factors can be used as reference samples. Such reference samples were prepared via electron beam lithography in cooperation with MPI (Erlangen). Arrays of cylinders with definite radii, heights and distances were etched in silicon wafers. These arrays of cylinders in turn were arranged in different distributions on the wafer (square lattice, uniformly distributed). GISAXS measurements on such reference samples were performed at a laboratory instrument and at BESSY II. Simulations and fits using the BornAgain software package are presented and put up for discussion.
