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5–6 Dec 2024
Munich Marriott Hotel
Europe/Berlin timezone

Electric field-assisted positron annihilation lifetime spectroscopy: Investigation of interface regions in thin-film Metal-Oxide-Silicon capacitors

6 Dec 2024, 13:45
3h
Marriott

Marriott

Board: P-019
Poster Positrons Poster Session

Speaker

Ricardo Helm (Universität der Bundeswehr München)

Description

Defects at internal interfaces pose a major concern for layered heterostructures. For example, in a MOSFET the defects at the SiO2/Si interface can introduce charge traps, which can degrade the electronic performance of the device. The defects in Metal-Oxide-Silicon (MOS) systems were extensively researched using depth-resolved beam-based positron-annihilation techniques. Unfortunately, the investigation of interfaces with a thickness of less than 5 nm is not a trivial task. This is due to the small extent of the interface compared to the implantation profile of monoenergetic positrons provided by large-scale facilities such as NEPOMUC or ELBE. In the past, efforts were made to manipulate the positron diffusion by applying an external electric field to various layered systems. The electric field leads to the drift of thermalized positrons towards the interfaces.
In this work, we present a positron drift experiment on a MOS system biased from -30 V (accumulation) to +30 V (depletion) investigated by electric field-assisted Positron-Annihilation Lifetime Spectroscopy (PALS). The results show, that the in-situ application of a sample bias, which is also available at the PLEPS, is a promising addition to the common positron annihilation methods to investigate ultra-thin structures such as interfaces.

Primary author

Ricardo Helm (Universität der Bundeswehr München)

Co-authors

Werner Egger (Universität der Bundeswehr München) Dr Catherine Corbel (Ecole Polytechnique Paris) Dr Peter Sperr (University of the Bundeswehr Munich) Dr Maik Butterling (Helmholtz Center Dresden-Rossendorf) Dr Andreas Wagner (Helmholtz Center Dresden-Rossendorf) Dr Maciej Oskar Liedke (Helmholtz Center Dresden-Rossendorf) Dr Eric Hirschmann (Helmholtz Center Dresden-Rossendorf) Johannes Mitteneder (Universität der Bundeswehr) Dr Michael Mayerhofer (University of the Bundeswehr Munich) Günther Dollinger Marcel Dickmann

Presentation materials

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