Dec 8 – 9, 2022
Europe/Berlin timezone

In-situ investigation during gold HiPIMS deposition onto polymers

Dec 9, 2022, 2:00 PM


Board: P-097
Poster Material Science Poster Session


Mr Yusuf Bulut (DESY/TUM)


Gold deposition via high power impulse magnetron sputtering (HiPIMS) allows to coat thin metal layers on heat sensitive materials such as polymers allowing for increased adhesion and density. HiPIMS allows deposition at a lower total deposited thermal energy in comparison to conventional magnetron sputtering, but this energy is delivered in a very short pulse exhibiting very high power and ionization. The consequences for the nucleation and growth processes during HiPIMS deposition are not sufficiently known. Therefore, we investigate the morphology evolution of thin gold layers on four polymer templates, namely polystyrene (PS), polystyrene sulfonicacid (PSS) and poly-4-vinylpyridin (P4VP). These polymers show different functional moieties and thus are expected to influence the growth of the gold layer. First results of the in situ investigations combining grazing-incidence small angle X-ray scattering (GISAXS), grazing incidence wide angle X ray scattering (GIWAXS) will be presented.

Primary author

Mr Yusuf Bulut (DESY/TUM)


Mr Kristian Reck (CAU) Benedikt Sochor (Deutsches Elektronen-Synchrotron) Mr Jonas Drewes (CAU) Suzhe Liang (Physical Department, TUM) Tianfu Guan (Technische Universität München, Fakultät für Physik, Lehrstuhl für Funktionelle Materialien, James-Franck-Str.1, 85748 Garching, Germany) Dr Matthias Schwartzkopf (Deutsches Elektronen-Synchrotron DESY, Notkestraße 85, 22607 Hamburg, Germany) Dr Thomas Strunskus (CAU) Prof. Franz Faupel (CAU) Peter Müller-Buschbaum (TU München, Physik-Department, LS Funktionelle Materialien) Stephan V. Roth (DESY / KTH)

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